Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials

نویسندگان

  • Na Liu
  • Feifei Wang
  • Lianqing Liu
  • Haibo Yu
  • Shaorong Xie
  • Jun Wang
  • Yuechao Wang
  • Gwo-Bin Lee
  • Wen J. Li
چکیده

The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.

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عنوان ژورنال:

دوره 6  شماره 

صفحات  -

تاریخ انتشار 2016